↓ Skip to main content

Wiley Online Library

A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy

Overview of attention for article published in Chemical Vapor Deposition, October 2014
Altmetric Badge

About this Attention Score

  • In the top 5% of all research outputs scored by Altmetric
  • One of the highest-scoring outputs from this source (#1 of 320)
  • High Attention Score compared to outputs of the same age (95th percentile)

Mentioned by

news
2 news outlets
twitter
17 X users
patent
4 patents
wikipedia
14 Wikipedia pages

Citations

dimensions_citation
179 Dimensions

Readers on

mendeley
448 Mendeley
citeulike
1 CiteULike