Modeling Mechanism and Growth Reactions for New Nanofabrication Processes by Atomic Layer Deposition

Overview of attention for article published in Advanced Materials, December 2015

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So far, Dimensions has found 60 publications that cite this research output.

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Chemisorption of silicon tetrachloride on silicon nitride: a density functional theory study

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Article in AATCC Journal of Research (January 2024)

Quantitative in situ synchrotron X-ray analysis of the ALD/MLD growth of transition metal dichalcogenide TiS 2 ultrathin films

Article in Nanoscale (January 2024)