A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy

Overview of attention for article published in Chemical Vapor Deposition, October 2014

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In the top 5% of all research outputs scored by Altmetric
One of the highest-scoring outputs from this source (#1 of 313)
High Attention Score compared to outputs of the same age (95th percentile)

Mentioned by

news: 2 news outlets
twitter: 17 X users

patent: 2 patents
wikipedia: 13 Wikipedia pages

Citations

dimensions_citation: 163 Dimensions

Readers on

mendeley: 419 Mendeley
citeulike: 1 CiteULike

Summary News X Patents Wikipedia Dimensions citations

So far, Dimensions has found 163 publications that cite this research output.

163

The most recent citing publications are shown below. View all 163 publications that cite this research output on Dimensions.

Atomic layer deposition of materials

Book chapter (January 2024)

Tailoring crystallisation of anatase TiO2 ultra-thin films grown by atomic layer deposition using 2D oxides as growth template

Article in Applied Surface Science (December 2023)

Atomic Layer Deposition of Zinc Oxide on Mesoporous Zirconia Using Zinc(II) Acetylacetonate and Air

Article in Chemistry of Materials (September 2023)