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A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy

Overview of attention for article published in Chemical Vapor Deposition, October 2014
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About this Attention Score

  • In the top 5% of all research outputs scored by Altmetric
  • One of the highest-scoring outputs from this source (#1 of 324)
  • High Attention Score compared to outputs of the same age (95th percentile)

Mentioned by

news
2 news outlets
twitter
17 X users
patent
2 patents
wikipedia
13 Wikipedia pages

Citations

dimensions_citation
178 Dimensions

Readers on

mendeley
437 Mendeley
citeulike
1 CiteULike